Paper Title:
Nondestructive Defect Characterization of SiC Epilayers and its Significance for SiC Device Research
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
601-604
DOI
10.4028/www.scientific.net/MSF.457-460.601
Citation
X. Y. Ma, M. Dudley, T. S. Sudarshan, "Nondestructive Defect Characterization of SiC Epilayers and its Significance for SiC Device Research", Materials Science Forum, Vols. 457-460, pp. 601-604, 2004
Online since
June 2004
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