Paper Title:
Anomalous Behavior of van der Pauw Sheet Resistance Measurements on 4H-SiC MOS Inversion Layers with Anisotropy Mobility
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
689-692
DOI
10.4028/www.scientific.net/MSF.457-460.689
Citation
N.S. Saks, M.G. Ancona, L. A. Lipkin, "Anomalous Behavior of van der Pauw Sheet Resistance Measurements on 4H-SiC MOS Inversion Layers with Anisotropy Mobility", Materials Science Forum, Vols. 457-460, pp. 689-692, 2004
Online since
June 2004
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