Paper Title:
Relationship between Surface Structures and Aluminium Incorporation Behaviour of SiC in Chemical Vapor Deposition
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
739-742
DOI
10.4028/www.scientific.net/MSF.457-460.739
Citation
T. Hatayama, H. Yano, Y. Uraoka, T. Fuyuki, "Relationship between Surface Structures and Aluminium Incorporation Behaviour of SiC in Chemical Vapor Deposition ", Materials Science Forum, Vols. 457-460, pp. 739-742, 2004
Online since
June 2004
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