Paper Title:
Formation of SiC Delta-Doped-Layer Structures by CVD
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
743-746
DOI
10.4028/www.scientific.net/MSF.457-460.743
Citation
K. Takahashi, M. Uchida, O. Kusumoto, K. Yamashita, R. Miyanaga, M. Kitabatake, "Formation of SiC Delta-Doped-Layer Structures by CVD", Materials Science Forum, Vols. 457-460, pp. 743-746, 2004
Online since
June 2004
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