Paper Title:
Non-Contact Doping Profiling in Epitaxial SiC
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
755-758
DOI
10.4028/www.scientific.net/MSF.457-460.755
Citation
A. Savtchouk, E. Oborina, A.M. Hoff, J. Lagowski, "Non-Contact Doping Profiling in Epitaxial SiC", Materials Science Forum, Vols. 457-460, pp. 755-758, 2004
Online since
June 2004
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