Paper Title:
Crystallinity and Photoluminescence Evaluation of Er-Implanted n-Type 4H-SiC Subjected to an Annealing Process
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
779-782
DOI
10.4028/www.scientific.net/MSF.457-460.779
Citation
S. Uekusa, H. Maruyama, "Crystallinity and Photoluminescence Evaluation of Er-Implanted n-Type 4H-SiC Subjected to an Annealing Process ", Materials Science Forum, Vols. 457-460, pp. 779-782, 2004
Online since
June 2004
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