Paper Title:
Electro-Chemical Mechanical Polishing of Silicon Carbide
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
801-804
DOI
10.4028/www.scientific.net/MSF.457-460.801
Citation
C. H. Li, R. J. Wang, J. Seiler, I. Bhat, "Electro-Chemical Mechanical Polishing of Silicon Carbide", Materials Science Forum, Vols. 457-460, pp. 801-804, 2004
Online since
June 2004
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