Paper Title:
Chemi-Mechanical Polishing of On-Axis Semi-Insulating SiC Substrates
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
805-808
DOI
10.4028/www.scientific.net/MSF.457-460.805
Citation
V.D. Heydemann, W.J. Everson, R. D. Gamble, D. Snyder, M. Skowronski, "Chemi-Mechanical Polishing of On-Axis Semi-Insulating SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 805-808, 2004
Online since
June 2004
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$32.00
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