Paper Title:
Mechanisms in Electrochemical Etching of α-SiC Substrates
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
813-816
DOI
10.4028/www.scientific.net/MSF.457-460.813
Citation
H. Mikami, T. Hatayama, H. Yano, Y. Uraoka, T. Fuyuki, "Mechanisms in Electrochemical Etching of α-SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 813-816, 2004
Online since
June 2004
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Price
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