Paper Title:
Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
885-888
DOI
10.4028/www.scientific.net/MSF.457-460.885
Citation
L. Cheng, J. R. B. Casady, J. Mazzola, J. B. Casady, Y. Koshka, V. Bondarenko, "Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation", Materials Science Forum, Vols. 457-460, pp. 885-888, 2004
Online since
June 2004
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