Paper Title:
Structural Defects Formed in Al-Implanted and Annealed 4H-SiC
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
889-892
DOI
10.4028/www.scientific.net/MSF.457-460.889
Citation
K. A. Jones, T.S. Zheleva, V.N. Kulkarni, M. H. Ervin, M. A. Derenge, R.D. Vispute, "Structural Defects Formed in Al-Implanted and Annealed 4H-SiC", Materials Science Forum, Vols. 457-460, pp. 889-892, 2004
Online since
June 2004
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