SiC Crystal Growth by HTCVD |
| Journal |
Materials Science Forum (Volumes 457 - 460) |
| Volume |
Silicon Carbide and Related Materials 2003 |
| Edited by |
Roland Madar, Jean Camassel and Elisabeth Blanquet |
| Pages |
9-14 |
| DOI |
10.4028/www.scientific.net/MSF.457-460.9 |
| Online since |
June, 2004 |
| Authors |
Alexsandre Ellison,
Björn Magnusson,
Björn Sundqvist,
G.R. Pozina,
J. Peder Bergman,
Erik Janzén,
A. Vehanen
|
| Keywords |
Bending, Bulk Growth, Dislocation, HTCVD, Micropipe, Semi-insulating (SI), Vacancy |
| Full Paper |
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