Paper Title:
Activation of Implanted Al and Co-Implanted Al/C or Al/Si in 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
929-932
DOI
10.4028/www.scientific.net/MSF.457-460.929
Citation
K. A. Jones, T.S. Zheleva, M. H. Ervin, P. B. Shah, M. A. Derenge, G.J. Gerardi, J. A. Freitas, R.D. Vispute, "Activation of Implanted Al and Co-Implanted Al/C or Al/Si in 4H-SiC", Materials Science Forum, Vols. 457-460, pp. 929-932, 2004
Online since
June 2004
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