Paper Title:
Effect of Thermal Field on Interface Step Structures during PVT Growth of (0001)Si 6H-SiC
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
95-98
DOI
10.4028/www.scientific.net/MSF.457-460.95
Citation
Z.G. Herro, B. M. Epelbaum, M. Bickermann, P. M. Masri , A. Winnacker, "Effect of Thermal Field on Interface Step Structures during PVT Growth of (0001)Si 6H-SiC ", Materials Science Forum, Vols. 457-460, pp. 95-98, 2004
Online since
June 2004
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