Silicon Carbide and Related Materials 2003
Materials Science Forum Volumes 457 - 460
doi:10.4028/www.scientific.net/MSF.457-460
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p1507
Substrate Bias Amplification of a SiC Junction Field Effect Transistor with a Catalytic Gate Electrode
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393 K
]
Authors: Shinji Nakagomi, M. Takahashi, Y. Kokubun, Lars Unéus, Susan Savage, H. Wingbrant, Mike Andersson, Ingemar Lundström, M. Löfdahl, Anita Lloyd Spetz
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p1511
Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates
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2 M
]
Authors: Rachael L. Myers-Ward, Stephen E. Saddow, Shailaja P. Rao, Karl D. Hobart, M. Fatemi, Francis J. Kub
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p1515
Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation
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1014 K
]
Authors: D. Panknin, Phillippe Godignon, Narcis Mestres, Efstathios K. Polychroniadis, J. Stoemenos, Gabriel Ferro, Jörg Pezoldt, Wolfgang Skorupa
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p1519
Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique
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193 K
]
Authors: Xiao An Fu, J. Dunning, Christian A. Zorman, Mehran Mehregany
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p1523
Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
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221 K
]
Authors: J. Dunning, Xiao An Fu, Srihari Rajgopal, Mehran Mehregany, Christian A. Zorman
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p1527
Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film
[
115 K
]
Authors: K. Rajanna, S. Tanaka, Toshio Itoh, Masayoshi Esashi
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p1531
Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates
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2 M
]
Authors: X.M.H. Huang, X.L. Feng, M.K. Prakash, S. Kumar, Christian A. Zorman, Mehran Mehregany, M.L. Roukes
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p1537
Sublimation Growth of Bulk AlN Crystals: Process Temperature and Growth Rate
[
899 K
]
Authors: Boris M. Epelbaum, Matthias Bickermann, Albrecht Winnacker
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p1541
Structural, Optical and Electrical Properties of Bulk AlN Crystals Grown by PVT
[
993 K
]
Authors: Matthias Bickermann, Boris M. Epelbaum, Albrecht Winnacker
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p1545
Experimental and Theoretical Analysis of Sublimation Growth of Bulk AlN Crystals
[
687 K
]
Authors: E.N. Mokhov, S.N. Smirnov, A.S. Segal, D. Bazarevskiy, Yuri N. Makarov, M.G. Ramm, H. Helava
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p1549
X-Ray Photoelectron Spectroscopy of Nitride Layer on SiC by Thermal Nitridation Using NH3
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101 K
]
Authors: L. YingShen, S. Hashimoto, Koji Abe, R. Hayashibe, Takanobu Yamagami, Masato Nakao, Kiichi Kamimura
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p1553
Plasma-Assisted Molecular Beam Epitaxial Growth of AlN Films on Vicinal Sapphire (0001) Substrates
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849 K
]
Authors: Xu-Qiang Shen, Hajime Okumura
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p1557
Growth of GaN/AlN Quantum Dots on SiC (000-1) by Plasma-Assisted MBE
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64 K
]
Authors: N. Gogneau, F. Fossard, Eva Monroy, Sylvain Monnoye, Hugues Mank, B. Daudin
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p1561
Control of the 2D/3D Transition of Cubic GaN/AlN Nanostructures on 3C-SiC Epilayers
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153 K
]
Authors: S. Founta, N. Gogneau, Eugénie Martinez, Gabriel Ferro, Yves Monteil, B. Daudin, H. Mariette
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p1565
In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer
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417 K
]
Authors: Takaya Suzuki, T. Inushima