Electrical Properties of Silicon Nitride |
|
| Journal | Materials Science Forum (Volume 47) |
|---|---|
| Volume | Preparation and Properties of Silicon Nitride Based Materials |
| Edited by | D.A. Bonnel and T. Y. Tien |
| Pages | 215-227 |
| DOI | 10.4028/www.scientific.net/MSF.47.215 |
| Citation | H. Ohno et al., 1991, Materials Science Forum, 47, 215 |
| Authors | H. Ohno, Y. Katano |
| Full Paper | 
Get the full paper by clicking here
|
First page example
