Paper Title:
Electrical Properties of Silicon Nitride
  Abstract

  Info
Periodical
Edited by
D.A. Bonnel and T. Y. Tien
Pages
215-227
DOI
10.4028/www.scientific.net/MSF.47.215
Citation
H. Ohno, Y. Katano, "Electrical Properties of Silicon Nitride", Materials Science Forum, Vol. 47, pp. 215-227, 1989
Online since
January 1991
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Price
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