Paper Title:
Silicon Nitride in Semiconductor Device Technology
  Abstract

  Info
Periodical
Edited by
D.A. Bonnel and T. Y. Tien
Pages
228-248
DOI
10.4028/www.scientific.net/MSF.47.228
Citation
M. Arienzo, W.A. Orr-Arienzo, "Silicon Nitride in Semiconductor Device Technology", Materials Science Forum, Vol. 47, pp. 228-248, 1989
Online since
January 1991
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Price
$32.00
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