Silicon Nitride in Semiconductor Device Technology |
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| Journal | Materials Science Forum (Volume 47) |
|---|---|
| Volume | Preparation and Properties of Silicon Nitride Based Materials |
| Edited by | D.A. Bonnel and T. Y. Tien |
| Pages | 228-248 |
| DOI | 10.4028/www.scientific.net/MSF.47.228 |
| Citation | M. Arienzo et al., 1991, Materials Science Forum, 47, 228 |
| Authors | M. Arienzo, W.A. Orr-Arienzo |
| Full Paper | 
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