ELID grinding is widely used as a high-productivity and super-precision grinding method for hard and brittle materials. It continues grinding stably with metal bonded diamond wheel due to its in-process dressing. Magnetorheological finishing (MRF) is a novel precision finishing process for hard and brittle materials. In this paper, ELID grinding and MRF are adopted to get high surface quality and remove subsurface damage of hard and brittle materials. The results show that this combination gives attention to both efficiency and quality and can be used to replace conventional optics manufacturing.