Paper Title:
Research on Multifunctional Micro Machining Equipment
  Abstract

To perform several micro-machining on same machine tool, a micro machining equipment was researched and developed. The equipment adopts some high and new technologies. It is equipped with high precision XYZ stage, a spindle with high rotation accuracy and variable rotation speed, a granite worktable, a block electro discharge grinding unit for machining micro rod, a ultrasonic vibration unit for workpiece vibrating, a high frequency pulse power supply for micro-ECM and a video microscopic system with high enlargement factor. The equipment can perform micro electro discharge machining (EDM), micro electrochemical machining (ECM), micro ultrasonic machining (USM) as well as their combination. It can also machine 3D microstructures. A series of experiments were carried out. Using micro-EDM, micro rods with the diameter of less than 5µm were ground on block electrode, micro holes and 3D microstructures were obtained. Shaped holes were machined by using combination of micro-EDM and micro-USM. A micro hole with the diameter of 100µm was machined via micro-ECM.

  Info
Periodical
Materials Science Forum (Volumes 471-472)
Edited by
Xing Ai, Jianfeng Li and Chuanzhen Huang
Pages
37-42
DOI
10.4028/www.scientific.net/MSF.471-472.37
Citation
B.X. Jia, Z. L. Wang, F. Q. Hu, X. H. Li, W. S. Zhao, "Research on Multifunctional Micro Machining Equipment", Materials Science Forum, Vols. 471-472, pp. 37-42, 2004
Online since
December 2004
Export
Price
$32.00
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