Paper Title:
Study on Hole Making in EACVD Thick Diamond Film
  Abstract

Few research works have been reported on hole making in EACVD thick diamond film, though many papers have been published on the preparation and smoothing of the film. In this paper, YAG laser and EDM were used to make holes in un-doped and Boron-doped diamond film respectively. Fundamental investigation was carried out on the effects of processing parameters on the holing efficiency and processed surface quality. The film surface was analyzed by means of Raman spectrum before and after holing. It is shown that YAG laser has a higher processing efficiency than EDM, but the latter can get a rounder hole.

  Info
Periodical
Materials Science Forum (Volumes 471-472)
Edited by
Xing Ai, Jianfeng Li and Chuanzhen Huang
Pages
644-648
DOI
10.4028/www.scientific.net/MSF.471-472.644
Citation
D. W. Zuo, W. Z. Lu, X. F. Li, X.Q. Chu, M. Wang, "Study on Hole Making in EACVD Thick Diamond Film", Materials Science Forum, Vols. 471-472, pp. 644-648, 2004
Online since
December 2004
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Price
$32.00
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