The luminance level of thin film Y2O3:Eu3+ phosphors deposited by a pulsed laser deposition (PLD) technique are not acceptable for field emission display (FED) because of so-called wave guiding effect. Corrugated glass plates were employed as a substrate in order to relieve the wave guiding effect and in turn improve light extraction efficiency of Y2O3:Eu3+ thin film phosphors. Integrated photoluminescent efficiency, film surface roughness and crystallinity were monitored as function of the pitch of corrugation. The integrated photoluminescence efficiency of Y2O3:Eu3+ thin film phosphor deposited on the corrugated substrate was promoted significantly. The corrugated substrate makes it possible not only to enhance the roughness of phosphor film surface but also to facilitate the film growth in a specific orientation if the pitch size condition was met.