Paper Title:
Microstructural Observation of Diamond Like Carbon Film Prepared from C2H2 / C5H6CH3 Plasma Beam Source
  Abstract

In this study, the microstructure of two kinds of diamond-like carbon films was studied. These films were produced during the deposition of two kinds of hydrocarbon gas plasma by a newly developed technique called plasma based ion implantation (PBII). Microstructural analysis was performed by means of high resolution transmission electron microscopy (HRTEM). An amorphous DLC film was obtained by using C2H2 plasma. The crystal structure of carbon ( (C 168H ) was generated inside the DLC film when C5H6CH3 plasma was used. The effect of the precursor gases used in the present experiment on the microstructure of the DLC film was also studied.

  Info
Periodical
Materials Science Forum (Volumes 475-479)
Main Theme
Edited by
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
Pages
2905-2908
DOI
10.4028/www.scientific.net/MSF.475-479.2905
Citation
L. Liu, A. Yamamoto, Y. Oka, M. Yatsuzuka, H. Tsubakino, "Microstructural Observation of Diamond Like Carbon Film Prepared from C2H2 / C5H6CH3 Plasma Beam Source", Materials Science Forum, Vols. 475-479, pp. 2905-2908, 2005
Online since
January 2005
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$32.00
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