Paper Title:
Microstructures and Properties of the DLC Films Prepared by PLD Process Using High Power High Frequency 308 nm Laser Beam
  Abstract

DLC and nanocrystalline diamond films were prepared by PLD process using 308 nm(XeCl) laser beam with high power(200-500 W) and high frequency(200-500 Hz). The effects of some parameters such as the laser power density, the repetition rate on the structures and characters of the DLC films under such extreme power and repetition rate conditions were studied for the first time. The results indicated that: (1) The microstructures of the films were varied from amorphous to nanocrystalline with the laser power density increased from 108 W/cm2 to 1010 W/cm2; (2) The properties of the films grew at 200 Hz and 300 Hz were better than that of the films grew at 500 Hz, with the laser power density remained constant at 1010 W/cm2.

  Info
Periodical
Materials Science Forum (Volumes 475-479)
Main Theme
Edited by
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
Pages
3631-3634
DOI
10.4028/www.scientific.net/MSF.475-479.3631
Citation
H. Y. Peng, L. X. Zhao, Z. S. Jin, B. L. Chen, B. Zhang, C. Zhou, M. H. Zhang, X. Yang, "Microstructures and Properties of the DLC Films Prepared by PLD Process Using High Power High Frequency 308 nm Laser Beam", Materials Science Forum, Vols. 475-479, pp. 3631-3634, 2005
Online since
January 2005
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$32.00
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