Granular C/Co/C films have been prepared by magnetron sputtering from C and Co onto glass substrates at room temperature and subsequent in situ annealing. C and Co targets use an RF and DC facing deposition mode respectively. The structural and magnetic properties of films at room temperature were investigated as functions of Co layer thickness, C layer thickness and annealing temperature. X-ray diffraction (XRD) shows the majority Co nanograins are formed as the hexagonal-close-packed (hcp) structure annealing at 400 °C. Vibrating sample magnetometer (VSM) measurements indicate that the magnetic moment lies well in the film plane. Hc reaches maximum near 20 nm-thick Co layer and 30 nm-thick C layer with annealing temperature of 400 °C for 30 min. Remanent squareness (S) close to 1 was achieved for the film in which C layer thickness is 45 nm. Scanning probe microscope (SPM) was used to scan surface morphology and magnetic domain structures. The average grain size varies from 10 nm to 15 nm after annealing.