Paper Title:
Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 475-479)
Main Theme
Edited by
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
Pages
3779-3782
DOI
10.4028/www.scientific.net/MSF.475-479.3779
Citation
C. G. Kang, S.W. Youn, J.W. Lee, "Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process", Materials Science Forum, Vols. 475-479, pp. 3779-3782, 2005
Online since
January 2005
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Price
$32.00
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