Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process |
| Journal |
Materials Science Forum (Volumes 475 - 479) |
| Volume |
PRICM-5 |
| Edited by |
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie |
| Pages |
3779-3782 |
| DOI |
10.4028/www.scientific.net/MSF.475-479.3779 |
| Citation |
Chung Gil Kang et al., 2005, Materials Science Forum, 475-479, 3779 |
| Online since |
January, 2005 |
| Authors |
Chung Gil Kang, S.W. Youn, J.W. Lee |
| Keywords |
Amorphous Silicon, Elastic Recovery, Nanoscratch, Pyrex 7740 Glass, Residual Stress |
| Full Paper |
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