Paper Title:
Effect of Pt Interlayer on Thermal Stability of NiSi Films
  Abstract

In this paper, the effect of a thin interlayer of Pt on thermal stability of NiSi films on Si(111) has been studied. The Ni/Pt/Si(111) bilayered samples with the same film thickness were annealed by rapid thermal annealing at 640 °C-900 °C. Both the X-ray diffraction analysis and four-probe measurements show a remarkable improvement in the thermal stability NiSi as a result of Pt interlayer. The possible reason for the enhanced NiSi thermal stability is attributed to the formation of the Ni(Pt)Si solid solution and its preferred orientation, leading to the decrease in the driving force of NiSi2 nucleation and the increase in the interfacial energy change respectively. The experimental results are explained in terms of Miedema’s Model and Thomas-Fermi-Dirac (TFD) equations in detail.

  Info
Periodical
Materials Science Forum (Volumes 475-479)
Main Theme
Edited by
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
Pages
3795-3798
DOI
10.4028/www.scientific.net/MSF.475-479.3795
Citation
Y. He, J. Y. Feng, Q.L. Wu, "Effect of Pt Interlayer on Thermal Stability of NiSi Films", Materials Science Forum, Vols. 475-479, pp. 3795-3798, 2005
Online since
January 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Hongying Dong, Wen Bo Han, Shu Jie Li
Abstract:The investigation on joining of SiC to SiC has been conducted for some years. It is essential that the mechanical and thermal properties of...
1255
Authors: Shi Kao Shi, Rui Long Zong, Ying Liu, Yue Hui Wang, Ji Zhou
Abstract:Surfactant-zirconium phosphate composites were prepared by surfactant cetyltrimethylammonium bromide intercalating to α-zirconium phosphate....
2589
Authors: Akihiro Shimamura, Linus Perander, Eiji Kanezaki, Mark Ian Jones, James B. Metson
Abstract:The collapsing layer structure of hydrogen phosphate intercalated Mg/Al-layered double hydroxides (LDH-HPO4) was investigated by...
67
Authors: Jie Zhen Hu, Pei Chang Deng, Xiang Wen Wang, Hai Bo Xu
Chapter 2: Frontiers of Materials Science and Engineering
Abstract:Ti/IrOx–TiO2/IrO2 and Ti/IrO2–Ta2O5 electrodes were prepared using thermal decomposition procedure, respectively. The microstructure and...
662
Authors: Nan Hai Sun
Chapter 6: Optical/Electronic/Magnetic Materials
Abstract:The development of CdTe/CdS solar cells on flexible substrates is reviewed in this article. Photovoltaic structures on lightweight and...
686