Paper Title:
The Evaluation of the Elastic Property in Nano-Scaled Thin Compressive Film on Patterned Substrates
  Abstract

The evaluation of elastic property for thin diamond-like carbon (DLC) films has been presented with buckle analysis of compressive stressed film on patterned substrate. When substrate has been patterned with adhesion release layer, the morphologies of buckle configuration on patterned layer has been controlled from straight sided (Euler) buckle to nonlinear telephone cord type buckle with respect to the pattern width. By using the simple equation for Euler buckle, the elastic modulus has been easily calculated, shown well consistent with the results by nano-indentation test.

  Info
Periodical
Materials Science Forum (Volumes 475-479)
Main Theme
Edited by
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
Pages
3935-3938
DOI
10.4028/www.scientific.net/MSF.475-479.3935
Citation
M.W. Moon, T.Y. Kim, K. R. Lee, K. H. Oh, "The Evaluation of the Elastic Property in Nano-Scaled Thin Compressive Film on Patterned Substrates ", Materials Science Forum, Vols. 475-479, pp. 3935-3938, 2005
Online since
January 2005
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$32.00
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