The plasma surface alloying low-alloy high speed steel (HSS) is carried out in vacuum chamber where a source electrode (W-Mo) and a work piece are properly placed. By using the sputter of glow-discharge, under the common function of electric field and temperature field, ?????? the desired alloying elements (W- Mo) are sputtered from the source cathode, traveling toward the substrate. Subsequently the alloying elements deposit onto the surface of the substrate, forming alloy diffusion layer which the depth may vary from several micron to several hundreds micron. In the end a surface low-alloy HSS steel would be produced after ultra-saturation ion carbonization. The composition of the alloyed layer is equal or similar with it of low-alloy HSS. The carbonized layer, without coarse eutectic ledeburite structure, possesses high density of finely and dispersed alloy carbides with tungsten equivalent 10% above and a significant improvement in surface hardness and wear resistance. The principle of plasma surface alloying and its test results and commercial products application are introduced in this paper.