Growth of 2 Inches 6H-SiC Single Crystals by Sublimation Method: The Comparison of α- and ß-SiC Powders |
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| Journal | Materials Science Forum (Volumes 483 - 485) |
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| Volume | Silicon Carbide and Related Materials 2004 |
| Edited by | Roberta Nipoti, Antonella Poggi and Andrea Scorzoni |
| Pages | 17-20 |
| DOI | 10.4028/www.scientific.net/MSF.483-485.17 |
| Citation | Soo Hyung Seo et al., 2005, Materials Science Forum, 483-485, 17 |
| Online since | May, 2005 |
| Authors | Soo Hyung Seo, Joon Suk Song, Myung Hwan Oh, Yen Zen Wang |
| Keywords | 6H-SiC, Polycrystal, Polytype, ß-SiC, Sublimation, α-SiC |
| Abstract | We examined the formation of poly-crystals and polytypes under the point of view applying various powder phases. 6H-SiC single crystal was easily grown by using the green (α-SiC) powder, while the poly-crystals were generated when β-SiC powder was utilized. The method of mixed β-SiC and carbon powder and of graphite pipe inserted in β-SiC powder were applied to overcome the generation of poly-crystals, respectively. It was confirmed that the occurrence of poly-crystals in 6H-SiC crystal was successfully suppressed by C-rich environment. |
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