Paper Title:
Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification
  Abstract

The influence of the different additions to the melt on the nucleation behavior during short time flash lamp processing was investigated. It was observed that germanium and carbon additions to the silicone melt led to an increase of the mass transport to the growing surface and to an increase of the nuclei size. In the case of germanium additions to the silicon melt an incorporation of germanium in the silicon substrate was observed.

  Info
Periodical
Materials Science Forum (Volumes 483-485)
Edited by
Roberta Nipoti, Antonella Poggi and Andrea Scorzoni
Pages
213-216
DOI
10.4028/www.scientific.net/MSF.483-485.213
Citation
J. Pezoldt, E. K. Polychroniadis, T. Stauden, G. Ecke, T. Chassagne, P. Vennéguès, A. Leycuras, D. Panknin, J. Stoemenos, W. Skorupa, "Nucleation Control in FLASIC Assisted Short Time Liquid Phase Epitaxy by Melt Modification", Materials Science Forum, Vols. 483-485, pp. 213-216, 2005
Online since
May 2005
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Price
$32.00
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