Paper Title:
Improved Resolution of Epitaxial Thin Film Doping Using FTIR Reflectance Spectroscopy
  Abstract

Room temperature Fourier Transform Infrared Reflection Spectroscopy (FTIR) was used to investigate the thickness and Free Carrier Concentration (FCC) of heavily and lightly doped 4H and 6H-SiC epitaxial films. Multiple epitaxial layer stacks typical of lateral devices such as the MESFET were grown on 6H-SiC semi-insulating substrates. The estimation of thickness and FCC of the n-channel epi layer is improved by studying the Longitudinal Optical Phonon Plasmon Coupled Modes (LPP). A modelbased analysis of the experimental reflectance spectra from these samples is performed using a dielectric function that accounts for the phonon-photon coupling and plasmonphoton coupling. The value of the LPP+ mode frequency estimated from the reflectance spectrum in the range 600-1200 cm-1 is observed to increase in direct correlation with the electron free-carrier concentration.

  Info
Periodical
Materials Science Forum (Volumes 483-485)
Edited by
Roberta Nipoti, Antonella Poggi and Andrea Scorzoni
Pages
397-400
DOI
10.4028/www.scientific.net/MSF.483-485.397
Citation
M. S. Mazzola, S. G. Sunkari, J. Mazzola, H. Das, G. Melnychuck, Y. Koshka, J. L. Wyatt, J. Zhang, "Improved Resolution of Epitaxial Thin Film Doping Using FTIR Reflectance Spectroscopy", Materials Science Forum, Vols. 483-485, pp. 397-400, 2005
Online since
May 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Masanobu Yoshikawa, Hirohumi Seki, Keiko Inoue, Takuma Kobayashi, Tsunenobu Kimoto
Chapter III: Processing of SiC
Abstract:We measured Fourier transform infrared (FT-IR) and cathodoluminescence (CL) spectra of SiO2 films with various thicknesses, grown...
460
Authors: Pauline Yew, Lee Sai Cheong, Ng Sha Shiong, Yoon Tiem Leong, Haslan Abu Hassan, Wei Li Chen
Chapter 8: Thin Film Materials and Devices
Abstract:Polarized infrared (IR) reflectance measurement was carried out to investigate the optical phonon modes of wurtzite structure...
614