Paper Title:
Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC
  Abstract

Recently, a systematic comparison of SIMS measurements with LTPL (Low Temperature Photoluminescence) spectra led us to propose a straightforward empirical calibration of the LTPL intensity versus Al content in 4H-SiC samples. In the present work we analyze the effect of the LTPL excitation power on the intensity of the Al-related features. We examine the influence of the excitation conditions on the calibration curve and determine the limitations of the method.

  Info
Periodical
Materials Science Forum (Volumes 483-485)
Edited by
Roberta Nipoti, Antonella Poggi and Andrea Scorzoni
Pages
449-452
DOI
10.4028/www.scientific.net/MSF.483-485.449
Citation
M. Zielinski, C. Balloud, S. Juillaguet, B. Boyer, V. Soulière, J. Camassel, "Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC", Materials Science Forum, Vols. 483-485, pp. 449-452, 2005
Online since
May 2005
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