Silicon Carbide and Related Materials 2004
| Paper Title | Page |
|---|---|
|
Effect of Nitrogen Doping on the Formation of Planar Defects in 4H-SiC Authors: D. Siche, M. Albrecht, J. Doerschel, K. Irmscher, H. J. Rost, M. Rossberg, D. Schulz |
39 |
|
Evolution Roots of Growth-Induced Polytype Domains in 6H-SiC Single Crystals Authors: Soo Hyung Seo, Joon Suk Song, Myung Hwan Oh, Yen Zen Wang |
43 |
|
SiC Crystal Growth by Sublimation Method with Modification of Crucible and Insulation Felt Design Authors: Jung Kyu Kim, Kap Ryeol Ku, Dong Jin Kim, Sang Phil Kim, Won Jae Lee, Byoung Chul Shin, Geun Hyoung Lee, Il Soo Kim |
47 |
|
Numerical Analysis of Growth Condition on SiC-CVD in the Horizontal Hot-Wall Reactor Authors: Shinichi Nishizawa, Michel Pons |
53 |
|
Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor Authors: Alessandro Veneroni, Fabrizio Omarini, Maurizio Masi, Stefano Leone, Marco Mauceri, Giuseppe Pistone, Giuseppe Abbondanza |
57 |
|
SiC and III-Nitride Growth in Hot-Wall CVD Reactor Authors: Erik Janzén, Peder Bergman, Örjan Danielsson, Urban Forsberg, Christer Hallin, Jawad ul Hassan, Anne Henry, Ivan G. Ivanov, A. Kakanakova-Georgieva, P.O.Å. Persson, Qamar-ul Wahab |
61 |
|
New Achievements on CVD Based Methods for SiC Epitaxial Growth Authors: Danilo Crippa, Gian Luca Valente, Alfonso Ruggiero, L. Neri, Ricardo Reitano, Lucia Calcagno, Gaetano Foti, Marco Mauceri, Stefano Leone, Giuseppe Pistone, Giuseppe Abbondanza, G. Abbagnale, Alessandro Veneroni, Fabrizio Omarini, L. Zamolo, Maurizio Masi, Fabrizio Roccaforte, G. Giannazzo, Salvatore Di Franco, Francesco La Via |
67 |
|
Increased Growth Rate in a SiC CVD Reactor Using HCl as a Growth Additive Authors: Rachael L. Myers-Ward, Olof Kordina, Z. Shishkin, Shailaja P. Rao, R. Everly, Stephen E. Saddow |
73 |
|
High Growth Rate (up to 20 µm/h) SiC Epitaxy in a Horizontal Hot-Wall Reactor Authors: Jie Zhang, Janice Mazzola, Carl Hoff, Yaroslav Koshka, Jeff B. Casady |
77 |
|
Homoepitaxial Growth of 4H-SiC Using CH3Cl Carbon Precursor Authors: Yaroslav Koshka, Huang De Lin, Galyna Melnychuck, Michael S. Mazzola, Jeffery L. Wyatt |
81 |
