Paper Title
Page
Authors: Hideki Shimizu, Kensaku Hisada, Yosuke Aoyama
Abstract:Effects of the flow rate of C3H8 passed through hydrogen plasma on deposition rates and^microstructures of 3C-SiC films on Si (100) substrate...
209
Authors: Jörg Pezoldt, Efstathios K. Polychroniadis, Thomas Stauden, Gernot Ecke, Thierry Chassagne, P. Vennéguès, André Leycuras, D. Panknin, J. Stoemenos, Wolfgang Skorupa
Abstract:The influence of the different additions to the melt on the nucleation behavior during short time flash lamp processing was investigated. It...
213
Authors: M. Smith, R.A. McMahon, Wolfgang Skorupa, M. Voelskow, J. Stoemenos
Abstract:This paper gives an insight into the thermal modeling of the i-FLASiC process, which is the flash lamp annealing of a 3C-SiC and silicon...
217
Authors: A. Shoji, Mitsutaka Nakamura, K. Mitikami, Toshiyuki Isshiki, Satoru Ohshima, Shigehiro Nishino
Abstract:The pendeo epitaxial growth has been applied for the growth of 3C-SiC on (001) Si substrates. This growth was performed by VPE using...
221
Authors: Didier Chaussende, Laurence Latu-Romain, Laurent Auvray, M. Ucar, Michel Pons, Roland Madar
Abstract:Thick (111) oriented β-SiC layers have been grown by hetero-epitaxy on a (0001) a-SiC substrate with the Continuous Feed-Physical Vapour...
225
Authors: Efstathios K. Polychroniadis, Carole Balloud, Sandrine Juillaguet, Gabriel Ferro, Yves Monteil, Jean Camassel, J. Stoemenos
Abstract:The evolution of defects versus thickness has been investigated in three different freestanding 3C-SiC samples, using TEM (Transmission...
229
Authors: M. Voelskow, D. Panknin, Efstathios K. Polychroniadis, Gabriel Ferro, Phillippe Godignon, Narcis Mestres, Wolfgang Skorupa, Yves Monteil, J. Stoemenos
Abstract:An approach for the defect density reduction in 3C-SiC epitaxially grown on Si is to improve the quality of the carbonized layer during the...
233
Authors: T. Nakata, Y. Ohshiro, A. Shoji, Yoichi Okui, Satoru Ohshima, Yoshihiko Hayashi, Shigehiro Nishino
Abstract:The selective growth of Si column was carried out by depositing Au on patterned Si (111) substrate as a solvent in chemical vapor transport...
237
Authors: Mikael Syväjärvi, L. Nasi, Gholam Reza Yazdi, Giancarlo Salviati, M. Izadifard, I.A. Buyanova, W.M. Chen, Rositza Yakimova
Abstract:Ferromagnetic phases in as-grown SiC have been studied. An interpretation about the formation based on details of the phase appearance in...
241
Authors: V.I. Kulik, A.V. Kulik, M.S. Ramm, A.S. Nilov, M.V. Bogdanov
Abstract:Two-dimensional model of conjugate heat and mass transport in Chemical Vapour Infiltration (CVI) process was developed. The model was used...
245
Showing 51 to 60 of 255 Paper Titles