The sensitivity of various combinations of optics to alignment errors is investigated. A large number of tests with varying specimen displacements and incident beam misalignments are performed for both line and point focus residual stress optics combinations. This investigation includes experiments with mixed combinations of typical “focusing beam optics” and “parallel beam optics”. It is verified if the peak positions are either sensitive to height errors like for the focusing beam geometry or insensitive like for the parallel beam geometry. The peak position sensitivity is classified for all combinations of incident beam and diffracted beam optics modules.