The spallation of thermal barrier coatings (TBCs) is promoted by thermally grown oxide (TGO). To improve TBCs, it is very important to understand the influence of TGO on the spalling stress. In this study ,the TBCs were oxidized at 1373 K for four diferent periods: 0, 500,1000 and 2000 h. The distribution of the in-plane stress in oxidized TBCs, s1, was obtained by repeating the X-ray stress measurement with low energy X-rays after successive removal of the surface layer. The distribution of the out-of-plane stress, s1− s3, was measured with hard synchrotron X-rays, because high energry X-rays have a large penetration depth. From the results by the low and high energy Xrays, the spalling stress in the oxidized TBCs, s3, was evaluated. The evaluated value of the spalling stress for the oxidized TBC was a small tension beneath the surface, but steeply increased near the interface between the top and bond coating. This large tensile stress near the interface is responsible for the spalling of the top coating.