Paper Title:
Evaluation of Residual Stress in Nano-TiO2 Film on ITO Glass by Synchrotron X-Ray Diffraction
  Abstract

In this study, evaluation of residual stress in nano-TiO2 film on ITO glass is carried out. The films with thickness less than 30 nm are prepared by the dual-arcs magnetron sputtering with gas pressure 10 and 20 Pa. The surface microstructure and grain morphology of the nano-TiO2 films are observed by the atomic force microscopy (AFM). In order to accurately evaluate the residual stress in the film, the Young’s modulus of the film is determined by the nanoindentation with three point bending method at first, then the internal residual stress in the film is measured by high energy X-ray diffraction with the synchrotron radiation facility Spring-8. The measured residual stresses of nano-TiO2 films prepared with gas pressure 10 and 20 Pa are -11.6 and -9.1 GPa, respectively. It is shown that the residual stress of TiO2 films decrease with the increasing of gas pressure.

  Info
Periodical
Materials Science Forum (Volumes 490-491)
Edited by
Sabine Denis, Takao Hanabusa, Bob Baoping He, Eric Mittemeijer, JunMa Nan, Ismail Cevdet Noyan, Berthold Scholtes, Keisuke Tanaka, KeWei Xu
Pages
637-642
DOI
10.4028/www.scientific.net/MSF.490-491.637
Citation
D. Y. Ju, T. Ueda, T. Hatakeyama, T. Arizono, K. Kusaka, H. Takao, "Evaluation of Residual Stress in Nano-TiO2 Film on ITO Glass by Synchrotron X-Ray Diffraction", Materials Science Forum, Vols. 490-491, pp. 637-642, 2005
Online since
July 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: T. Turutoğlu, M. Ürgen, A.F. Çakır, A. Öztürk
489
Authors: Bob B. He
Abstract:This paper introduces the recent progress in two-dimensional X-ray diffraction as well as its applications in residual stress analysis in...
613
Authors: Chao Chang A. Chen, Wei En Fu, Meng Ke Chen
Abstract:Subsurface residual stresses of tungsten films induced by Chemical Mechanical Polishing (CMP) processes were investigated by the Grazing...
75
Authors: Kenji Suzuki, Takahisa Shobu
Abstract:As the top coating, zirconia with 4 mol% yttria was electron beam-physical vapor deposited (EB-PVD) on the bond coating of CoNiCrAlY. The...
906
Authors: Jang Woo Kim, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
Chapter 12: Other Related Technologies
Abstract:We present a study of the improvement in interface roughness of platinum/carbon multilayers for X-ray mirrors. The X-ray reflectivity of...
1076