Paper Title:
Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays
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Periodical
Materials Science Forum (Volumes 490-491)
Edited by
Sabine Denis, Takao Hanabusa, Bob Baoping He, Eric Mittemeijer, JunMa Nan, Ismail Cevdet Noyan, Berthold Scholtes, Keisuke Tanaka, KeWei Xu
Pages
661-666
DOI
10.4028/www.scientific.net/MSF.490-491.661
Citation
M. Hataya, H. Takao, K. Kusaka, K. Tominaga, T. Matsue, O. Sakata, "Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays", Materials Science Forum, Vols. 490-491, pp. 661-666, 2005
Online since
July 2005
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