X-Ray Measurements of Residual Stress Distribution in TiN Thin Films with Fiber Texture
| Periodical | Materials Science Forum (Volumes 490 - 491) |
|---|---|
| Main Theme | Residual Stresses VII, ICRS7 |
| Edited by | Sabine Denis, Takao Hanabusa, Bob Baoping He, Eric Mittemeijer, JunMa Nan, Ismail Cevdet Noyan, Berthold Scholtes, Keisuke Tanaka, KeWei Xu |
| Pages | 678-683 |
| DOI | 10.4028/www.scientific.net/MSF.490-491.678 |
| Citation | Keisuke Tanaka et al., 2005, Materials Science Forum, 490-491, 678 |
| Online since | July, 2005 |
| Authors | Keisuke Tanaka, Yoshiaki Akiniwa, Masanori Kawai, Toshimasa Ito |
| Keywords | Fiber Texture, Grazing Incidence X-Ray Diffraction, Residual Stress, Thin Film, Titanium Nitride, Two-Tilt Method, X-Ray Stress Measurement |
| Price | US$ 28,- |
The TiN films with the thickness of 0.1, 0.2, 0.5, 1.0, and 4.0 µm were coated on a steel substrate by the ion beam mixing method. The film had a strong fiber texture with <001> axis perpendicular to the film surface. The in-plane stress measurement was applicable to the thickness down to 0.1 µm of TiN films. The stress was a compression of around 2 GPa. The compressive stress was found to increase below the surface layer of 20 to 30 nm. Thinner films had a steeper increase of the compressive stress in the very-near surface region. The strain distribution measured by the SV method was nearly constant over the region of the penetration depth between 0.3 and 0.6 µm from the surface. The two-tilt method combined with the surface removal method showed a nearly constant distribution of compression in the subsurface region and a sharp increase near the interface to the substrate.
