Paper Title:
New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines
  Abstract

The article takes into account various factors which effect the texture evolution in the Cu lines. We propose here an explanation for the formation of {111}<110> and {111}<112> texture in the Cu lines. The explicit role of principal stresses, shear stresses and dislocations is discussed. The influence of line spacing on strength of the {111}<110> and {111}<112> texture components is also demonstrated in relation to the dislocation density.

  Info
Periodical
Materials Science Forum (Volumes 495-497)
Edited by
Paul Van Houtte and Leo Kestens
Pages
1449-1454
DOI
10.4028/www.scientific.net/MSF.495-497.1449
Citation
K. K. Mirpuri, J. A. Szpunar, "New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines ", Materials Science Forum, Vols. 495-497, pp. 1449-1454, 2005
Online since
September 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dalibor Vojtěch, Alena Michalcová
Abstract:Nearly equi-atomic Ni-Ti alloys (nitinol) show shape memory behavior, superelasticity, high strength, excellent corrosion resistance and...
471
Authors: Xin Li Song, Ze Xi Yuan, Juan Jia, Li Xia Fan, Ping He Li
Abstract:The development of texture and grain boundary character are researched for a boron bearing IF steel after recrystallization annealing for...
243
Authors: Olga Sukhopar, Günter Gottstein
Wednesday
Abstract:In the present study, a modified cellular automaton CORe (Cellular Operator for Recrystallization) was used to predict the recrystallization...
455
Authors: Wen Min Shi, Jing Liu, Chang Yi Li
Chapter 3: Iron and Steel
Abstract:The recrystallization behavior of the cold rolled 3%Si nonoriented electrical steel at different temperatures is investigated by...
678
Authors: Anoop Kumar, Balasunder, T. Raghu, S. Rajesham
Chapter 8: Mechanical Processing
Abstract:High specific strength metals with high formability are paramount requirement for maximizing productivity of structural components, aircraft...
381