Paper Title:
Accounting for Secondary Extinction in Thickness Measurement of Thin Films by X-Ray Absorption
  Abstract

Allowing for secondary extinction (SE), a method is described for thickness measurement of thin films by x-ray absorption. The method is tested by employing Al foils and electrodeposited Cu films detached by the substrate. The thicknesses determined by the method were in fair agreement with that ones measured by the ordinary absorption method based on using incident beam intensities. Moreover, a dependence of the SE coefficient on the transmission factor of the films was experimentally shown, and thus additional light was thrown on the nature of SE.

  Info
Periodical
Materials Science Forum (Volumes 495-497)
Edited by
Paul Van Houtte and Leo Kestens
Pages
99-104
DOI
10.4028/www.scientific.net/MSF.495-497.99
Citation
I. Tomov, "Accounting for Secondary Extinction in Thickness Measurement of Thin Films by X-Ray Absorption", Materials Science Forum, Vols. 495-497, pp. 99-104, 2005
Online since
September 2005
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