Paper Title:
The Role of Energy in Formation of Sputtered Nanocomposite Films
  Abstract

The paper analysis the effect of energy E, delivered to the growing film by bombarding ions and fast condensing atoms, on its (i) structure, (ii) elemental and phase composition and (iii) physical properties. A special attention is devoted to the macrostress s generated in sputtered films under ion bombardment. The conditions under which thick, low-stress sputtered films can be produced are given.

  Info
Periodical
Edited by
Masaaki Naka and Toshimi Yamane
Pages
291-296
DOI
10.4028/www.scientific.net/MSF.502.291
Citation
J. Musil, J. Šůna, "The Role of Energy in Formation of Sputtered Nanocomposite Films ", Materials Science Forum, Vol. 502, pp. 291-296, 2005
Online since
December 2005
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