Paper Title:
Enhancement of Adhesive Strength of DLC Film by Plasma-Based Ion Implantation
  Abstract

The thick diamond-like carbon (DLC) film of good-adhesion was prepared on a stainless steel (SUS304) substrate by a hybrid process of plasma-based ion implantation and deposition using hydrocarbon gases such as methane, acetylene, and toluene. In this process, a high repetition pulsed plasma was produced by RF pulse (13.56 MHz) with the duration of 50 µs and the repetition rate of 0.5 - 1 kHz. Besides, the plasma ions were implanted to the substrate by a negative pulsed voltage of -20 kV and the pulse duration of 5 µs. Ion implantation served to produce a graded interface of carbon component in the boundary region of DLC film and substrate, and also to reduce the residual stress to several MPa, enhancing the adhesive strength of DLC film. Furthermore, the adhesive strength of DLC film was increased above the epoxy resin strength (about 65 MPa) by implantation of mixed Si and C ions.

  Info
Periodical
Edited by
Masaaki Naka and Toshimi Yamane
Pages
315-320
DOI
10.4028/www.scientific.net/MSF.502.315
Citation
M. Kirinuki, A. Tomita, M. Kusuda, Y. Oka, A. Murakami, M. Yatsuzuka, "Enhancement of Adhesive Strength of DLC Film by Plasma-Based Ion Implantation ", Materials Science Forum, Vol. 502, pp. 315-320, 2005
Online since
December 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Fan Xiu Lu, Yu Mei Tong, X.H. Gao, Wei Zhong Tang, Cheng Ming Li, Guang Chao Chen
Abstract:In the present investigation a specially designed ceramic interlayer, which is able to supply suitable protection of the ZnS substrate...
3599
Authors: Li Gou, Ji Lei Zhu, Jun Guo Ran, Suang Feng Yan
Abstract:In order to improve the adhesion between diamond coatings and cemented tungsten carbide (WC-Co) substrates, the diamond coatings were...
1889
Authors: Hui Qing Fan, Jin Chen, Xiu Li Chen
Abstract:Lead magnesium niobate-lead titanate (0.8Pb(Mg1/3Nb2/3)O3-0.2PbTiO3, PMN-PT) thick films in the thickness range about 75 μm have been...
24
Authors: Kai Feng Qin, Lin Jun Wang, Ji Jun Zhang, Jia Hua Min, Xiao Yan Liang, Jian Huang, Ke Tang, Yi Ben Xia
Abstract:In this paper, the effects of different metal contact treatments were systemically investigated. The interfacial properties between Au and...
1298