Micro-Anode Guided Electroplating (MAGE) Control System |
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| Journal | Materials Science Forum (Volumes 505 - 507) |
|---|---|
| Volume | Progress on Advanced Manufacture for Micro/Nano Technology 2005 |
| Edited by | Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng |
| Pages | 115-120 |
| DOI | 10.4028/www.scientific.net/MSF.505-507.115 |
| Citation | Dong Liang Lee et al., 2006, Materials Science Forum, 505-507, 115 |
| Online since | January, 2006 |
| Authors | Dong Liang Lee, Jui Chang Lin, P.F. Kao, S.B. Jiang |
| Keywords | 3D Micro-Structure, Localized Electro-Deposition, MAGE, Micro-Anode Guided Electroplating, Micro-Fabrication |
| Abstract | This article releases the details of the equipment development for the micro-anode guided electroplating MAGE fabrication. The microstepping architecture, electroplating power source, control system architecture, measurement system, man machine interface and the control prodedure will be described. Metallic columns around 100 micrometers in diameter were fabricated up to 2cm long with this equipment to demonstrate its performance. An innovative intermittent MAGE mode is supported by this equipment so that it can produce micro columns of finer surface morphology and better circumferential uniformity than the conventional continuous electroplating. |
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