Study of a Miniature Air Bearing Linear Stage System |
| Journal |
Materials Science Forum (Volumes 505 - 507) |
| Volume |
Progress on Advanced Manufacture for Micro/Nano Technology 2005 |
| Edited by |
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng |
| Pages |
13-18 |
| DOI |
10.4028/www.scientific.net/MSF.505-507.13 |
| Online since |
January, 2006 |
| Authors |
Kuang Chao Fan,
R.H. Yen,
Chi Chung Ho
|
| Keywords |
Air Bearing, Laser Drilling, Micro Hole, Micro-Electro-Mechanical Systems (MEMS), Straightness |
| Abstract |
For the purpose of micro stage used in micro positioning, a miniature aerostatic air bearing linear slide system was studied. Different arrayed micro-hole plates were fabricated. Using focused laser drilling, the diameter of the hole is limited to 300 m. However, with the MEMS process, smaller diameters up to 30 m could be achieved. A miniature air bearing linear slide was constructed by imbedding three developed air pads in the slider block, which could slide along a small granite
straightedge to form a small sliding stage. The pressure distribution of air pad simulated by the Spectral Element Method was found in good agreement with experimental results. It was also found that the smaller the micro holes the better stability of the floating condition can be obtained. Straightness tests of the developed miniature air bearing sliding stage are carried out to show its
feasibility. |
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