Paper Title:
Modal and Stability Analysis of a Micro-Beam Structure Actuated by Electrostatic Force
| Periodical | Materials Science Forum (Volumes 505 - 507) |
|---|---|
| Main Theme | Progress on Advanced Manufacture for Micro/Nano Technology 2005 |
| Edited by | Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng |
| Pages | 403-408 |
| DOI | 10.4028/www.scientific.net/MSF.505-507.403 |
| Citation | Hong Hee Yoo et al., 2006, Materials Science Forum, 505-507, 403 |
| Online since | January, 2006 |
| Authors | Hong Hee Yoo, Kang Sik Jung, Seung Jae Moon |
| Keywords | Electrostatic Force, Micro Beam Structure, Modal Analysis, Stability Analysis |
| Price | US$ 28,- |
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Abstract
For the design of a vibrating micro-beam structure, modal and stability analyses of the structure actuated by electrostatic force is performed in the present study. Static deflection of the micro-beam caused by the electrostatic force is first obtained by solving the nonlinear equilibrium equation and the modal and stability characteristics are calculated at the static equilibrium position. It is found that the amplitude and the frequency of the applied electrostatic voltage influence the stability of the structure significantly. A design specification of a vibrating micro-beam structure can be effectively determined from the modal and the stability analysis results.
