Paper Title:
Modal and Stability Analysis of a Micro-Beam Structure Actuated by Electrostatic Force
  Abstract

For the design of a vibrating micro-beam structure, modal and stability analyses of the structure actuated by electrostatic force is performed in the present study. Static deflection of the micro-beam caused by the electrostatic force is first obtained by solving the nonlinear equilibrium equation and the modal and stability characteristics are calculated at the static equilibrium position. It is found that the amplitude and the frequency of the applied electrostatic voltage influence the stability of the structure significantly. A design specification of a vibrating micro-beam structure can be effectively determined from the modal and the stability analysis results.

  Info
Periodical
Materials Science Forum (Volumes 505-507)
Edited by
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
Pages
403-408
DOI
10.4028/www.scientific.net/MSF.505-507.403
Citation
H. H. Yoo, K. S. Jung, S. J. Moon, "Modal and Stability Analysis of a Micro-Beam Structure Actuated by Electrostatic Force", Materials Science Forum, Vols. 505-507, pp. 403-408, 2006
Online since
January 2006
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Price
$32.00
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