Paper Title:
Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling
  Abstract

The piezo-actuated stages are composed of the piezo-electric actuator and the positioning mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behavior of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward compensating based on the hysteresis observer is proposed in this paper. Identifying its parameters is very important; so the genetic algorithm is studied to find the optimal parameters. To verify the feasibility of the proposed method, it is implemented on the precision positioning task of the piezo-actuated stage in the real-time control architecture.

  Info
Periodical
Materials Science Forum (Volumes 505-507)
Edited by
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
Pages
487-492
DOI
10.4028/www.scientific.net/MSF.505-507.487
Citation
C. J. Lin, S. Y. Chen, "Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling", Materials Science Forum, Vols. 505-507, pp. 487-492, 2006
Online since
January 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: So Nam Yun, Young Bog Ham, Jung Ho Park, Byung Oh Choi
Abstract:This paper presents a computer-based tracking control approach for a piezoelectric actuator based on incorporating a feedforward loop with a...
1399
Authors: Jin Wei Liang, Hung Yi Chen, Shy Yaw Chiang
Abstract:The fuzzy sliding-mode control strategy is used to tackle tracking problem of a piezo-actuated stage in this paper. The piezo-actuated...
401
Authors: Chih Jer Lin, Shu Yin Chen
Abstract:The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning...
235
Authors: Guo Ping Li, Tong Peng Han, Li Sheng Shu
Abstract:Noncircular turning is necessary for machining various irregular shaped workpieces. Tool positioning control is essential for a noncircular...
4097
Authors: Qing Song Liu, Zhen Zhang, J.Q. Mao
Chapter 6: Control and Guided Systems
Abstract:A rate-dependent hysteresis model for Giant Magnetostrictive Actuator (GMA) is proposed based on Hammerstein model structure. The Generalized...
406