Paper Title:
Fabrication and Characterization of 3D Aspheric Microlenses with Arbitrary Surface Profiles Based on a Novel Excimer Laser Contour Scanning Method
  Abstract

This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Two different microlenses with spherical and aspheric surfaces profiles with dimension less than 200 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

  Info
Periodical
Materials Science Forum (Volumes 505-507)
Edited by
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
Pages
67-72
DOI
10.4028/www.scientific.net/MSF.505-507.67
Citation
Y. C. Lee, C. Y. Wu, "Fabrication and Characterization of 3D Aspheric Microlenses with Arbitrary Surface Profiles Based on a Novel Excimer Laser Contour Scanning Method", Materials Science Forum, Vols. 505-507, pp. 67-72, 2006
Online since
January 2006
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$32.00
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