Paper Title:
Highly Sensitive Infrared Temperature Sensor for CMOS Compatible Thermopiles
  Abstract

A high-sensitivity infrared detector requires small thermal capacitance and small thermal conductance to maximize the temperature change and signal induced by incident IR radiation. The suspended structure of infrared sensors provides ideal, thermally isolated, structures for support of the thin film detector. A new idea of improving CMOS thermopile performance is introduced to reduce the thermal conductance by dividing the thermocouple into several segments, which greatly increase the heat flow barrier. Then, adjacent segments are connected by a minimum width of alumina wire, which change the heat path and accumulated heat at the joint points. Several designs of infrared microsensors can improve performance of signal with reduce of thermal conductance. To that end, by using some adequate designs of polysilicon architecture, we can greatly reduce the heat flow from the main stream without introducing further electric resistance, which is related with noise. The design and simulation of thermopile sensors are realized by using the process parameters of standard 0.351m CMOS IC technology. Firstly we develop such a structure of thermopile with low thermal conductance and high performance by using CMOS compatible process which can be easily and naturally fabricated. The simulation results show good match with our original idea and great performance than before.

  Info
Periodical
Materials Science Forum (Volumes 505-507)
Edited by
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
Pages
73-78
DOI
10.4028/www.scientific.net/MSF.505-507.73
Citation
C. A. Huang, C. H. Shen, "Highly Sensitive Infrared Temperature Sensor for CMOS Compatible Thermopiles", Materials Science Forum, Vols. 505-507, pp. 73-78, 2006
Online since
January 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Tae Hoon Lee, Jang Ho Ha, Sang Yoon Lee, Won Il Ko, Dae Yong Song, Ho Dong Kim
239
Authors: Wei Ping Chen, Chang Chun Dong, Xiao Wei Liu, Zhi Ping Zhou
Abstract:In this paper, the writers reported on a fluxgate sensor and a CMOS-ASIC for sensor supply. The design method and principle of the interface...
164
Authors: Fei Bao Lu, Guo Lin Lu, You Shu Huang, Xiang Hui Yuan
Energy Efficiency, Environment Ecology
Abstract:A 320×240 readout circuit (ROIC) for the uncooled pyroelectric infrared detector was fabricated in the double-poly-double-metal (DPDM) N-well...
284
Authors: Jiang Wang, Wei Ping Jing, Yan Jin Li
Chapter 12: Ecological Civilization and Low-Carbon Economy
Abstract:Recently, scientists discovered that relaxor-based ferroelectric single crystals, such as...
1918
Authors: Farooq Ahmad, John Ojur Dennis, Mohd Haris Md Khir, Nor Hisham Hamid
Chapter 14: Computer-Aided Design, Manufacturing and Engineering
Abstract:This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant...
4205