Paper Title
Page
Authors: Tae Wan Ku, June Key Lee, Beom Soo Kang
Abstract:A numerical approach for forming simulation and manufacturing of micro part, based on the elastic and the rigid-plastic finite element...
61
Authors: Yung Chun Lee, Chun Ying Wu
Abstract:This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour...
67
Authors: Chun An Huang, Chih Hsiung Shen
Abstract:A high-sensitivity infrared detector requires small thermal capacitance and small thermal conductance to maximize the temperature change and...
73
Authors: Jeong Woo Park, Deug Woo Lee, Noboru Takano, Noboru Morita
Abstract:Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed...
79
Authors: Jung Han Song, Hoon Huh, Seung Ho Kim, H.Thomas Hahn
Abstract:Nanoimprint lithography (NIL) process at the room temperature has been proposed newly to achieve the shape accuracy and to overcome the...
85
Authors: Wei Ching Chuang, Chi Ting Ho, Yi Ru Lian, Ching Kong Chao, Ruey Fang Shyu, Wei Chih Wang
Abstract:A new means of transducing mechanical force using a diffractive Bragg grating based polymeric sensor is presented. The diffraction gratings...
91
Authors: Ching Yen Ho, Mao Yu Wen
Abstract:This paper investigated the absorption of a micro-particle irradiated by laser. Micro-particles usually appear within the plasma induced by...
97
Authors: Chao Heng Chien, Hui Min Yu
Abstract:It presented a novel manufacturing method that was derived from traditional hot embossing technology to fabricate actuators on polymer...
103
Authors: Meng Ju Lin, Rong Shun Chen
Abstract:During depositing a thin film as a structure layer, residual stress from thermal treatment of depositing process will cause deformation after...
109
Authors: Dong Liang Lee, Jui Chang Lin, P.F. Kao, S.B. Jiang
Abstract:This article releases the details of the equipment development for the micro-anode guided electroplating MAGE fabrication. The microstepping...
115
Showing 11 to 20 of 220 Paper Titles